Capacitive micromachined ultrasound transducers (CMUT) are produced by using microtechnologies, which are common to the microelectromechanical systems (MEMS). CMUTs will be used to create compact, mass-production enabled sensors, which are sensitive to the small gas molecules and liquid suspended biomolecules. These sensors will be proposed to be applied for individualized medical care and for the environment pollution control. CMUT structure is composed of electrostatically actuated micromembrane arrays. They are sensitive to the gas or biomolecules, which are selectively adsorbed to the device’s surface. Therefore the development of the sensors for carbon monoxide, methane, sulfur and nitrogen oxides detection in the air. In parallel, using the same device technology, biosensors selectively detecting the antibodies, enzymes, other proteins and peptides, also DNR will be developed. This kind of biosensors will be applicable for diagnosis and treatment of various diseases.
Project funding:
This research project is funded by the European Regional Development Fund according to the 2014–2020 Operational Programme for the European Union Funds’ Investments, under measure’s No. 01.2.2-LMT-K-718 activity “Research Projects Implemented by World-class Researcher Groups to develop R&D activities relevant to economic sectors, which could later be commercialized”.
Project results:
Prototypes of gas and biomolecule sensors, based on electrostatic CMUT structure, will be created. The concept of a gas sensor will be demonstrated by selective and simultaneous detection of several different gas molecules. Biosensor concept will be demonstrated with selective affinity interaction between biomolecules.
Period of project implementation: 2020-10-05 - 2023-10-31
Project coordinator: Kaunas University of Technology
